The 65h JSAP Spring Meeting, 2018

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17 Nanocarbon Technology » 17.3 Layered materials

[19p-C202-1~17] 17.3 Layered materials

Mon. Mar 19, 2018 1:45 PM - 6:30 PM C202 (52-202)

Akinobu Kanda(Univ. of Tsukuba), Yasuhide Ohno(Tokushima univ)

5:45 PM - 6:00 PM

△ [19p-C202-15] Deposition of high-k dielectrics on 2D channel by PO2 controlled thermal evaporation

〇Kohei Maruyama1, Kosuke Nagashio1,2 (1.The Univ. of Tokyo, 2.JST-PRESTO)

Keywords:High-k