The 65h JSAP Spring Meeting, 2018

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7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[20p-B303-1~8] 7.2 Applications and technologies of electron beams

Tue. Mar 20, 2018 2:00 PM - 4:15 PM B303 (53-303)

Tadahiro Kawasaki(JFCC), Mitsunori Kitta(AIST)

2:45 PM - 3:00 PM

[20p-B303-4] Development of electrostatic Cs-corrector for SEM using annular and circular electrodes

〇Tadahiro Kawasaki1, Ryuji Yoshida1, Takeharu Kato1, Shunichi Motomura2, Tsunenori Nomaguchi2, Toshihide Agemura2, Masahiro Tomita3, Takashi Ikuta4 (1.JFCC, 2.Hitachi High-Tech., 3.Vac. Device, 4.OECU)

Keywords:Aberration correction, SEM