MIKIO KADOI

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 9:00 AM - 12:00 PM C309 (C309)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[18a-C309-1~10] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:15 AM - 9:30 AM

[18a-C309-2] Development of bio-template arrangement equipment for realizing mask-less defect-free fabrication

〇MIKIO KADOI¹, MASAHISA ISHIDA², MAMI TANAKA², MASAHIRO SOTA², DAISUKE OHORI³, SHUICHI NODA⁴, YOSHIYUKI NOZAWA⁵, BRIAN RIAO⁵, RYOSUKE FUJII⁵, TOSHIYASU HAYAMI⁵, KAZUHIKO ENDO⁴, SEIJI SAMUKAWA³ (1.LTJ Corp., 2.NAGASE & CO., LTD., 3.IFS, Tohoku Univ., 4.AIST, 5.SPT Co., Ltd.)

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