Nobuo Sasaki

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 9:30 AM - 11:45 AM E304 (E304)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[18a-E304-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:30 AM - 9:45 AM

[18a-E304-1] Effect of a-Si Film Thickness on the (100) texture in the CW Laser Crystallizaion on Glass Substrate

〇Nobuo Sasaki^1,2,3, Arif Muhammad², Yukiharu Uraoka², Jun Gotoh³, Shigeto Sugimoto³ (1.Sasaki Consulting, 2.NAIST, 3.V-technology)