Kota Kawano

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 1:45 PM - 5:15 PM C309 (C309)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[18p-C309-1~13] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

2:30 PM - 2:45 PM

△ [18p-C309-4] Comparison between characteristics of twin-cathode and twin-anode torches

〇(B)Kota Kawano¹, Hideki Sasaoka¹, Muneo Furuse¹, Satoshi Sakiyama² (1.NIT, Oshima college, 2.Yamaguchi Univ.)