Nguyen ThiKhanh Hoa

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 1:45 PM - 5:15 PM C309 (C309)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[18p-C309-1~13] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

3:00 PM - 3:15 PM

▲ [18p-C309-6] Direct observation of phase transformation and transient reflectivity of amorphous silicon film during micro-thermal plasma jet irradiation

〇(D)Nguyen ThiKhanh Hoa¹, Yuri Mizukawa¹, Hiroaki Hanafusa¹, Seichiiro Higashi¹ (1.Hiroshima Univ.)