Kenta Hori

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 1:45 PM - 4:15 PM E304 (E304)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[18p-E304-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

2:45 PM - 3:00 PM

[18p-E304-5] Electric current for SiC_xN_yO_zthin film formation rate by room temperature PECVD

Toru Watanabe¹, 〇Kenta Hori¹, Hitoshi Habuka¹ (1.Yokohama Nat. Univ.)