Takuya Yorioka

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 1:30 PM - 5:00 PM B11 (B11)

Symposium (Oral)
| Symposium (technical)
| Interfacial Nano Electrochemistry - Diversification of Semiconductor Wet Process

[19p-B11-1~8] Interfacial Nano Electrochemistry - Diversification of Semiconductor Wet Process

4:45 PM - 5:00 PM

[19p-B11-8] Effect of concertation of the etching solution on formation of Si-TSVs using metal-assisted chemical etching

〇Takuya Yorioka¹, Shunsuke Hanatani¹, Takeshi Ito¹, Tomohiro Shimizu¹, Shoso Shingubara¹ (1.Kansai Univ.)