Takuya Mitarai

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 1:15 PM - 6:45 PM E206 (E206)

Oral presentation
| 3 Optics and Photonics
| 3.15 Silicon photonics

[19p-E206-1~19] 3.15 Silicon photonics

4:00 PM - 4:15 PM

△ [19p-E206-10] Effect of dummy patterns on Si wafer for InP/Si direct bonding toward hybrid photonic devices on Si-platform through CMOS process

〇Takuya Mitarai¹, Miki Inamura³, Tomoyuki Abe³, Kenji Morita¹, Tomohiro Amemiya^1,2, Nobuhiko Nishiyama^1,2 (1.Tokyo Tech., 2.FIRST, 3.Ayumi Ind.)