Satoru Iioka

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 1:45 PM - 5:45 PM E305 (E305)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[19p-E305-1~15] 13.3 Insulator technology

1:45 PM - 2:00 PM

[19p-E305-1] Evaluation of the density of thermal oxide films on SiC(000-1)

〇Satoru Iioka¹, Ryu Hasunuma¹ (1.Univ. of Tsukuba)