Mitsuru Ueno

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 9:00 AM - 12:15 PM B31 (B31)

Oral presentation
| Joint Session K
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[20a-B31-1~12] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

9:45 AM - 10:00 AM

[20a-B31-4] Development of High Quality IGZO Deposition Technology

〇Mitsuru Ueno¹, Taku Hanna¹, Motoshi Kobayash¹, Makoto Arai¹, Junya Kiyota¹ (1.ULVAC,Inc.)