Kazuya Tamura

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 9:00 AM - 12:15 PM E301 (E301)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[20a-E301-1~12] 13.7 Compound and power electron devices and process technology

9:45 AM - 10:00 AM

[20a-E301-4] DLTS studies of interface states for SiO₂/n-GaN deposited by different methods

〇(M2)Kazuya Tamura¹, Yutaka Tokuda¹, Takashi Okawa², Hidemoto Tomita² (1.Aichi Inst. of Technol., 2.Toyota Motor Corporation)