Fumihiko Hirose

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 1:30 PM - 5:45 PM N304 (N304)

Symposium (Oral)
| Symposium (technical)
| Latest trend on atomic layer processes

[20p-N304-1~10] Latest trend on atomic layer processes

3:00 PM - 3:30 PM

[20p-N304-4] RT atomic layer deposition and its application to gas barrier

Kensaku Kanomata², Masanori Miura², 〇Fumihiko Hirose¹ (1.Yamagata Univ., 2.ROEL, Yamagata Univ.)