The 80th JSAP Autumn Meeting 2019

Akihisa Ogino

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Chairperson, etc.

Wed. Sep 18, 2019 1:45 PM - 5:15 PM C309 (C309)

  • Oral presentation
  • | 8 Plasma Electronics
  • | 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[18p-C309-1~13] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Akihisa Ogino(Shizuoka Univ.), Shota Nunomura(AIST)