Session information

Oral presentation

8 Plasma Electronics » 8.8 Plasma Electronics Award Speech

[19a-B32-1~2] 8.8 Plasma Electronics Award Speech

Thu. Sep 19, 2019 9:30 AM - 10:30 AM B32 (B32)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

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9:30 AM - 10:00 AM

[19a-B32-1] [Plasma Electronics Award Speech] Plasma-induced defects ~ towards defect-free semiconductor plasma processing ~

〇Shota Nunomura¹, Isao Sakata¹, Koji Matsubara¹ (1.AIST RCPV)

10:00 AM - 10:30 AM

[19a-B32-2] [Plasma Electronics Award Speech] Layer-by-layer etching of LaAlSiO_x

〇Mitsuhiro Omura¹, Kazuhito Furumoto¹, Kazuhisa Matsuda¹, Toshiyuki Sasaki¹, Itsuko Sakai¹, Hisataka Hayashi¹ (1.Toshiba Memory)

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