The 80th JSAP Autumn Meeting 2019

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6 Thin Films and Surfaces » 6.6 Probe Microscopy

[18p-C310-1~14] 6.6 Probe Microscopy

Wed. Sep 18, 2019 1:30 PM - 5:15 PM C310 (C310)

Takashi Ichii(Kyoto Univ.), Yoichi Otsuka(Osaka Univ.)

4:45 PM - 5:00 PM

[18p-C310-13] Development of an atomic force microscope integrated with a scanning electron microscope for evaluating electronic devices

〇Takeshi Uruma1, Nobuo Satoh2, Hidekazu Yamamoto2, Kenta Nakazawa3, Futoshi Iwata1,3 (1.Graduate School of Sci. and Tech., Shizuoka Univ., 2.Chiba Ins. of Tech., 3.Shizuoka Univ.)

Keywords:Atomic force microscope, Scanning electron microscope, Semiconductor device