[19a-E318-1~12] 【CS.7】 7.2 電子ビーム応用、7.4 量子ビーム界面構造計測、9.5 新機能材料・新物性のコードシェアセッション

[19a-E318-11] Time-Resolved X-ray Diffraction From Nitride Thin Films: Observation of the Specular Rod

〇Wolfgang Voegeli¹、Masamitu Takahasi^2,3、Takuo Sasaki²、Seiji Fujikawa²、Kanya Sugitani³、Tetsuroh Shirasawa⁴、Etsuo Arakawa¹、Tomohiro Yamaguchi⁵ (1.Tokyo Gakugei Univ.、2.QST、3.Univ. of Hyogo、4.AIST、5.Kogakuin Univ)

キーワード：thin film growth, X-ray diffraction, time-resolved

We present a method for time-resolved X-ray diffraction and reciprocal space mapping that can be used for in-situ observation of thin film growth with sub-second time resolution. The application of the method to the growt of InGaN thin films will also be reported.