[19a-PA3-1~10] 3.13 Semiconductor optical devices

[19a-PA3-10] Defect level estimation in chlorine-terminated hexagonal selenium thin-film

〇Shigeyuki Imura¹, Keitada Mineo¹, Kazunori Miyakawa¹, Masakazu Nanba¹, Misao Kubota¹ (1.NHK STRL)

Keywords:crystalline selenium, image sensor, chlorine

Recently, to meet the demands of recent high definition imaging systems, the number of pixels of the image sensor has increased. Owing to the reduced pixel size of the image sensor, the amount of light received per pixel has significantly decreased. To solve the problems, we have been developed the high sensitivity CMOS image sensors overlaid with the crystalline selenium (c-Se)-based photoconversion layer. In this study, we doped the chlorine into Se to terminate the dangling bonds in hexagonal Se. We confirmed the reduction of defects level in c-Se using low-temperature cathodeluminescence.