[19a-PA3-1~10] 3.13 Semiconductor optical devices

[19a-PA3-9] Crystalline Selenium-Based Stacked Pixel-Parallel CMOS Image Sensor Suitable for Single-Photon Counting

〇Masahide Goto¹, Shigeyuki Imura¹ (1.NHK STRL)

Keywords:image sensor, photon counting, crystalline selenium

We have studied a concept of high-efficiency, avalanche-type, crystalline selenium (c-Se)-based stacked CMOS image sensor with pixel-parallel signal processor. In this study, the first integration of prototype sensors was demonstrated in a non-photon counting mode. We confirmed the images captured by the developed 128 × 96 pixels, indicating the feasibility of next-generation photon count imaging.