[20a-C212-1~4] Hydrogen in oxides and its role

[20a-C212-2] Hydrogen in amorphous oxide semiconductors: Effects on thin film growth and device characteristics

〇Toshio Kamiya^1,2, Hideo Hosono² (1.MSL, Tokyo Tech, 2.MCES, Tokyo Tech)

Keywords:hydrogen, amorphous oxide semiconductor, instability

Hydrogen has critical roles for optoelectronic properties of semiconductors even if hydrogen is not intentionally doped. In this talk, we will review the roles of hydrogen in amorphous oxide semicondcutors in comparison with a-Si, crystalline oxide, and other inorganic semiconductors.