[20a-E311-1~11] 15.6 Group IV Compound Semiconductors (SiC)

[20a-E311-1] 3C-SiC n-MOS capacitor and n-MOSFET with SiO₂/Al₂O₃ insulator

〇Keisuke Yamamoto¹, Ryusei Oka¹, Dong Wang¹, Hiroshi Nakashima², Shigeomi Hishiki³, Keisuke Kawamura^2,3 (1.IGSES, Kyushu Univ., 2.GIC, Kyushu Univ., 3.Air Water)

Keywords:3C-SiC, MOS capacitor, MOSFET