The 80th JSAP Autumn Meeting 2019

Presentation information

Print

Oral presentation

15 Crystal Engineering » 15.6 Group IV Compound Semiconductors (SiC)

[20a-E311-1~11] 15.6 Group IV Compound Semiconductors (SiC)

Fri. Sep 20, 2019 9:00 AM - 12:00 PM E311 (E311)

Yu-ichiro Matsushita(Tokyo Tech)

9:15 AM - 9:30 AM

△ [20a-E311-2] Charge analysis of SiO2/Al2O3 gate dielectric on (111) oriented 3C-SiC

〇Ryusei Oka1, Keisuke Yamamoto1, Dong Wang1, Hiroshi Nakashima2, Shigeomi Hishiki3, Keisuke Kawamura3 (1.IGSES Kyushu Univ., 2.GIC Kyushu Univ., 3.Air water)

Keywords:semiconductor