9:30 AM - 11:30 AM
[20a-PA4-7] Droplet-Vaporization Behavior in Plasma during Plasma-assisted Mist Chemical Vapor Deposition (II)
Keywords:Mist CVD
Presentation information
Poster presentation
8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment
[20a-PA4-1~14] 8.2 Plasma deposition of thin film, plasma etching and surface treatment
Fri. Sep 20, 2019 9:30 AM - 11:30 AM PA4 (PA)