[20p-E203-7~19] 3.5 Laser system and materials

[20p-E203-15] Power Scaling of Tunable Picosecond DUV Laser for Semiconductor Inspection

〇Kentaro Miyata¹, Akihiro Tanabashi¹, Mizuki Mohara², Kei Shimura², Shinichi Nakayama³, Satoshi Wada¹ (1.RIKEN, 2.Hitachi High-Tech, 3.Megaopto)

Keywords:deep-UV

We present power scaling of a tunable picosecond Yb-fiber MOPA and its frequency conversion to realize a high-power DUV illumination light source for semiconductor inspections