[20p-E204-1~11] 3.13 Semiconductor optical devices

[20p-E204-9] Calculation for the effect of axis offset in optical microcavity by Fox-Li method

〇Yuta Suzuki¹, Yuma Kitagawa¹, Shin-ichiro Tezuka¹ (1.Yokogawa Electric Corporation)

Keywords:VCSEL, optical cavity, laser

We have developed MEMS-VCSEL which has a wide tunable range, single mode oscillation, mode hop free tuning and 350kHz swept rate. The optical cavity is composed of half-VCSEL chip with DBR and optical gain and MEMS chip with concave mirror. Misalignment and tilt of mirror caused by thermocompression bonding affect the laser characteristics, so it is important for design to estimate the influence. We also have developed the numerical simulation for Fabry-Perot microcavity. In this work, we calculated the effect of the mirror misalignment by using Rayleigh-Sommerfeld diffraction.