Growth of Al<sub>0.55</sub>Ga<sub>0.45</sub>N thick films on AlN templates with nano-sized patterned grooves

Shouhei Teramura; Sakuragi Yusuke; Yasue Shinji; Tanaka Shunya; Ogino Yuya; Iwaya Motoaki; Takeuchi Tsuya; Kamiya Satoshi; Iwayama Sho; Akasaki Isamu; Miyake Hideto

Presentation information

Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[20p-E310-1~21] 15.4 III-V-group nitride crystals

Fri. Sep 20, 2019 1:15 PM - 7:00 PM E310 (E310)

Narihito Okada(Yamaguchi Univ.), Yoshio Honda(Nagoya Univ.), Tomoyuki Tanikawa(Osaka Univ.)

2:15 PM - 2:30 PM

△ [20p-E310-5] Growth of Al_0.55Ga_0.45N thick films on AlN templates with nano-sized patterned grooves

〇(M1)Shouhei Teramura¹, Sakuragi Yusuke¹, Yasue Shinji¹, Tanaka Shunya¹, Ogino Yuya¹, Iwaya Motoaki¹, Takeuchi Tsuya¹, Kamiya Satoshi¹, Iwayama Sho^1,3, Akasaki Isamu², Miyake Hideto³ (1.Dept. of Mat. Sci. & Eng., Meijo Univ., 2.Akasaki Research Center, Nagoya Univ., 3.Grad. Sch. of Reg. Inn. Stu., Mie Univ.)

Keywords:AlGaN, nanopattern

Presentation information

[20p-E310-1~21] 15.4 III-V-group nitride crystals

△ [20p-E310-5] Growth of Al0.55Ga0.45N thick films on AlN templates with nano-sized patterned grooves

△ [20p-E310-5] Growth of Al_0.55Ga_0.45N thick films on AlN templates with nano-sized patterned grooves