The 80th JSAP Autumn Meeting 2019

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15 Crystal Engineering » 15.6 Group IV Compound Semiconductors (SiC)

[21a-E311-1~7] 15.6 Group IV Compound Semiconductors (SiC)

Sat. Sep 21, 2019 9:00 AM - 10:45 AM E311 (E311)

Shunta Harada(Nagoya Univ.)

9:15 AM - 9:30 AM

[21a-E311-2] Vapor-phase polycrystalline SiC coating by TSSG-applied technique

〇Yuta Yokobayashi1, Naomichi Tsuchimoto1, Yuki Kagami2, Syuichi Yamamoto2, Koki Suzuki1, Toshinori Taishi1 (1.Shinsyu Univ. (Eng.), 2.Aszac Inc.)

Keywords:SiC coating