Haruki Kai

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 1:30 PM - 4:45 PM W934 (W934)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[10p-W934-1~12] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

4:30 PM - 4:45 PM

[10p-W934-12] Temperature control of clean room by simulation and virtual metrology

〇Haruki Kai¹, Kumagae Yuki¹, Abe Narumi¹, Iwamura Ko², Kubota Hiroshi¹, Hashishin Takeshi¹, Yoshioka Masao² (1.GSST Kumamoto Univ., 2.Kumamoto Univ.)