[10p-W934-1~12] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[10p-W934-12] Temperature control of clean room by simulation and virtual metrology

〇Haruki Kai¹, Kumagae Yuki¹, Abe Narumi¹, Iwamura Ko², Kubota Hiroshi¹, Hashishin Takeshi¹, Yoshioka Masao² (1.GSST Kumamoto Univ., 2.Kumamoto Univ.)

Keywords:semiconductor, temperature control, simulation

In the current clean room temperature control method, excessive electric power is easily consumed because the total amount of fans of the CR is controlled with the same amount. However, by using the method proposed this time, it is possible to control only the place where temperature control is necessary, so it is possible to suppress power consumption.
We also conducted experiments to increase air circulation efficiency.