Omi Yoshida

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 9:30 AM - 11:30 AM PA2 (PA)

Poster presentation
| 3 Optics and Photonics
| 3.2 Equipment optics and materials

[11a-PA2-1~17] 3.2 Equipment optics and materials

9:30 AM - 11:30 AM

[11a-PA2-4] Development of KrF lamp with variable pulse width

〇(M2)Omi Yoshida¹, Kazuyuki Uno¹, Takahisa Jitsuno² (1.Univ. Yamanashi, 2.ILE, Osaka Univ.)