[11a-PA2-1~17] 3.2 Equipment optics and materials

[11a-PA2-4] Development of KrF lamp with variable pulse width

〇(M2)Omi Yoshida¹, Kazuyuki Uno¹, Takahisa Jitsuno² (1.Univ. Yamanashi, 2.ILE, Osaka Univ.)

Keywords:KrF lamp, longitudinal excitation scheme, Discharge at low gas pressure

We are developing small and simple KrF laser device.In this study, the discharge and emission characteristics of KrF at low gas pressure (6-100 kPa) was investigated by longitudinal excitation scheme .In this study, the dependence of emission pulse, emission spectrum and voltage on four types of discharge tubes, four types of excitation circuits and sixteen mixed gases were measured.As a result, a KrF lamp capable of controlling the pulse width from 10 ns to 400 ns and the spectral width from 2.5 nm to 10 nm has been developed.