Yuuki Ooe

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 9:00 AM - 11:30 AM S011 (South Lecture Bldg.)

Oral presentation
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[11a-S011-1~9] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

11:15 AM - 11:30 AM

[11a-S011-9] 【Highlight】High-aspect etching of b-Ga2O3 by hydrogen atmosphere anisotropic thermal etching (HEATE)

〇Yuuki Ooe¹, Yuske Namae¹, Akihiro Matsuoka¹, Yusei Kawasaki¹, Daichi Ito¹, Yuuta Moriya¹, Rie Togashi¹, Akihiko Kikuchi^1,2 (1.Sophia Univ, 2.Sophia Nanotechnology Research Center)

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