The 66th JSAP Spring Meeting, 2019

Yoshiomi Hiranaga

Speaker, Author, Co-Author

Mon. Mar 11, 2019 9:00 AM - 12:00 PM W351 (W351)

  • Oral presentation
  • | 6 Thin Films and Surfaces
  • | 6.1 Ferroelectric thin films

Sat. Mar 9, 2019 1:15 PM - 3:45 PM M114 (H114)

  • Oral presentation
  • | 13 Semiconductors
  • | 13.4 Si processing /Si based thin film / MEMS / Equipment technology