Hiroto Kobayashi

→ Search for Hiroto Kobayashi in Google Scholar

Speaker, Author, Co-Author

Mon. Mar 11, 2019 9:00 AM - 11:45 AM W934 (W934)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[11a-W934-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

11:15 AM - 11:30 AM

△ [11a-W934-10] Third-Phase Evaluation of Minority Carrier Lifetime in FZ-Si Affected by Si-IGBT Process

〇Hiroto Kobayashi¹, Ryo Yokogawa^1,2, Kosuke Kinoshita¹, Yohichiroh Numasawa¹, Atsushi Ogura¹, Shin-ichi Nishizawa³, Takuya Saraya⁴, Kazuo Ito⁴, Toshihiko Takakura⁴, Shin-ichi Suzuki⁴, Munetoshi Fukui⁴, Kiyoshi Takeuchi⁴, Toshiro Hiramoto⁴ (1.Meiji Univ., 2.JSPS Research Fellow DC, 3.Kyushu Univ., 4.Univ. of Tokyo)

▲