Shinya Takashima

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 1:30 PM - 3:30 PM PB3 (PB)

Poster presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[11p-PB3-1~27] 13.7 Compound and power electron devices and process technology

1:30 PM - 3:30 PM

[11p-PB3-16] Evaluation of lightly-implanted Mg and co-implantation into p-GaN epi layers by capacitance measurement

〇Shinya Takashima¹, Katsunori Ueno¹, Ryo Tanaka¹, Hideaki Matsuyama¹, Masaharu Edo¹, Kohei Shima², Kazunobu Kojima², Shigefusa F. Chichibu^2,3, Akira Uedono⁴ (1.Fuji Electric, 2.Tohoku Univ., 3.Nagoya Univ. IMass, 4.Tsukuba Univ.)

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