Takayuki Matsuda

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Speaker, Author, Co-Author

Tue. Mar 12, 2019 9:30 AM - 11:30 AM PB3 (PB)

Poster presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[12a-PB3-1~16] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:30 AM - 11:30 AM

[12a-PB3-15] Patterning of BN Film Using Dry Etching Methods

〇Takayuki Matsuda¹, Masao Noma², Michiru Yamashita³, Shigehiko Hasegawa⁴, Keiichiro Urabe⁵, Koji Eriguchi⁵, Sang-Seok Lee¹ (1.Tottori Univ., Graduate School of Engineering, 2.SHINKO SEIKI., 3.Hyogo Prefectural Institute of Technology, 4.Osaka Univ., 5.Kyoto Univ.)

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