Takashi Yajima

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 9:00 AM - 12:00 PM M114 (H114)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[9a-M114-1~12] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

11:45 AM - 12:00 PM

[9a-M114-12] Cleanroom-Free Environment-Control System PLAD for Minimal fab (Ⅲ)

〇Takashi Yajima^1,2, Noriko Miura¹, Masaharu Yasui^1,2, Sommawan Khumpuang^1,2, Hitoshi Maekawa^1,2, Shiro Hara^1,2 (1.MINIMAL, 2.AIST)