Ryuji Kawakita

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 1:15 PM - 3:45 PM M114 (H114)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[9p-M114-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

2:45 PM - 3:00 PM

[9p-M114-7] Transfer Time Shortening on Low temperature Meniscus Force Mediated Layer Transfer

〇(B)Ryuji Kawakita¹, Tomotaka Hirano¹, Hiroaki Hanahusa¹, Seiichiro Higashi¹ (1.Graduate School of Advanced Sciences of Matter, Hiroshima Univ)