WENHSIN CHANG

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 1:45 PM - 5:45 PM S221 (S221)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[9p-S221-1~15] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

5:00 PM - 5:15 PM

[9p-S221-13] The impact of backside Si passivation on UTB-GeOI channel

〇WENHSIN CHANG¹, Toshifumi Irisawa¹, Hiroyuki Ishii¹, Noriyuki Uchida¹, Tatsuro Maeda¹ (1.AIST)