Ningrui Bai

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 1:15 PM - 4:30 PM W834 (W834)

Oral presentation
| 1 Interdisciplinary Physics and Related Areas of Science and Technology
| 1.6 Ultrasonics

[9p-W834-1~12] 1.6 Ultrasonics

2:45 PM - 3:00 PM

△ [9p-W834-7] High quality ScAlN films grown by using arc-melted and sintered ScAl alloy target sputtering

〇Ningrui Bai^1,2, Rei Karasawa^1,2, Shinji Takayanagi⁴, Makoto Imakawa⁵, Keisuke Morisaka⁵, Yu Suzuki⁵, Takahiko Yanagitani^1,2,3 (1.Waseda Univ., 2.ZAIKEN, 3.JST PRESTO, 4.Nagoya Inst. Tech., 5.FURUYA METAL CO., Ltd.)

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