9:00 AM - 9:15 AM
〇Toshifumi Imajo1, Kenta Moto1, Keisuke Yamamoto2, Takashi Suemasu1, Hiroshi Nakashima3, Kaoru Toko1 (1.Univ. of Tsukuba, 2.IGSES, Kyushu Univ., 3.GIC, Kyushu Univ.)
Oral presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Sun. Mar 10, 2019 9:00 AM - 12:00 PM M114 (H114)
Takashi Noguchi(Univ. of the Ryukyus), Seiichiro Higashi(Hiroshima Univ.)
△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above
9:00 AM - 9:15 AM
〇Toshifumi Imajo1, Kenta Moto1, Keisuke Yamamoto2, Takashi Suemasu1, Hiroshi Nakashima3, Kaoru Toko1 (1.Univ. of Tsukuba, 2.IGSES, Kyushu Univ., 3.GIC, Kyushu Univ.)
9:15 AM - 9:30 AM
〇Masaya Saito1, Daichi Takahara1, Toshifumi Imajo1, Kenta Moto1, Takashi Suemasu1, Kaoru Toko1 (1.Univ. of Tsukuba)
9:30 AM - 9:45 AM
〇(M2)Hiroki Utsumi1, Akito Hara1 (1.Tohoku Gakuin Univ.)
9:45 AM - 10:00 AM
〇Shogo Shigemasu1, Hideaki Tanimura1, Kazuhiko Fuse1, Takayuki Aoyama1, Shinichi Kato1, Yoshihide Nozaki1 (1.SCREEN Semiconductor Solutions)
10:00 AM - 10:15 AM
〇(B)Fuminobu Hamano1, Kaname Imokawa1,2, Daisuke Nakamure1, Hiroshi Ikenoue1,2 (1.Kyushu Univ., 2.Dept. of Gigaphoton Next GLP, Kyushu Univ.)
10:15 AM - 10:30 AM
〇Takashi Noguchi1, Ryusuke Nakatsura1, Yuya Ishiki1, Tatsuya Okada1, Karim Huet2 (1.Univ. of the Ryukyus, 2.SCREEN Semiconductor Solutions Co., Ltd.)
10:45 AM - 11:00 AM
〇(B)Takahiro Yamada1, Kaname Imokawa1,2, Daisuke Nakamura1, Tetsuya Goto3, Hiroshi Ikenoue1,2 (1.Kyushu Univ., 2.Dept. of Gigaphoton Next GLP, Kyushu Univ., 3.Tohoku Univ.)
11:00 AM - 11:15 AM
〇Nobuo Sasaki1,2, Muhammad Arif2, Yukiharu Uraoka2 (1.Sasaki Consulting, 2.NAIST)
11:15 AM - 11:30 AM
〇Yuri Mizukawa1, Hanafusa Hiroaki1, Seiichiro Higashi1 (1.Hiroshima Univ.)
11:30 AM - 11:45 AM
〇Tatsuki Koyanagi1, Toshiki Shirakawa1, Mitsuki Hirasue1, Wenchang Yeh1 (1.Shimane Univ.,Interdisciplinary Fac. Sci. & Engng.)
11:45 AM - 12:00 PM
〇Mitsuki Hirasue1, Wenchang Yeh1 (1.Shimane Univ.)
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