[12a-PB1-1~9] 8.1 Plasma production and diagnostics

Tue. Mar 12, 2019 9:30 AM - 11:30 AM PB1 (PB)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

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9:30 AM - 11:30 AM

[12a-PB1-1] Ion Bombardment to Insulated Surface by Applying DC Pulse Voltage to a Microwave Antenna

〇Sho Fukuda¹, Kou Udagawa¹, Haruka Suzuki¹, Yuki Tauchi², Hirotaka Toyoda¹ (1.Nagoya Univ., 2.Kobe Steel Ltd)

9:30 AM - 11:30 AM

[12a-PB1-2] Improvement of controlling iron vapor flux by induction heating for producing iron endohedral fullerene

〇Takayuki Omori¹, Koji Onishi¹, Tatsuto Takeda¹, Kouta Hamada¹, Kazuki Okumura¹, Yushi Kato¹ (1.Osaka Univ.)

9:30 AM - 11:30 AM

[12a-PB1-3] Preliminary experiments for optimization of multipole magnetic field and position of extraction electrode on ECRIS

〇Kazuki Okumura¹, Tatsuto Takeda¹, Onisi Kouji¹, Hamada Kouta¹, Omori Takayuki¹, Kato Yushi¹ (1.osaka univ)

9:30 AM - 11:30 AM

[12a-PB1-4] Fluid analysis of an atmospheric-pressure μplasma ejected from a narrow nozzle

〇Hiroyuki Yoshiki¹, Kenji Otosaka¹, Takehiko Sato², Tomoki Nakajima², Satoshi Uehara² (1.Tsuruoka National College of Tech., 2.Tohoku Univ.)

9:30 AM - 11:30 AM

[12a-PB1-5] Delayed discharge and optical emission characteristics in high power pulsed magnetron sputtering with Ar flow control

〇(M1)Hiroshi Nishida¹, Yoshihiro Hirai¹, Yuki Nakagomi¹, Nobuo Nishimiya¹, Masaomi Sanekata¹, Hiroaki Yamamoto², Masahide Tona², Keizo Tsukamoto², Keijiro Ohshimo³, Fuminori Misaizu³ (1.Tokyo Polytechnic Univ., 2.Ayabo Corp, 3.Tohoku Univ.)

9:30 AM - 11:30 AM

[12a-PB1-6] Micro- and macro-pulse designs in high power pulsed magnetron sputtering and the optical emission spectroscopy for generated plasma

〇Yuki Nakagomi¹, Yoshihiro Hirai¹, Hiroshi Nishida¹, Nobuo Nishimiya¹, Masaomi Sanekata¹, Hiroaki Yamamoto², Masahide Tona², Keizo Tsukamoto², Keijiro Ohshimo³, Fuminori Misaizu³ (1.Tokyo Polytechnic Univ., 2.Ayabo Corp, 3.Tohoku Univ.)

9:30 AM - 11:30 AM

[12a-PB1-7] Measurements of Emission Propagation Phenomena in a Low-Temperature Atmospheric-Pressure Plasma Jet

〇HIROMASA YAMADA¹, KOUTA OGIWARA¹, MAKOTO SHINOHARA¹, MIYASHITA RYO¹, KEIYA MURAISHI¹, HIDETO TANAKA¹ (1.NIT, Ngano col.)

9:30 AM - 11:30 AM

[12a-PB1-8] Measurement of Reactive Oxygen Radicals with Polyvinyl Alcohol - Potassium Iodine

〇Hiroto Matsuura¹, Yoshiki Matsui¹, Bounyang Ouanthavinsak¹, Tran Trung Nguyen¹, Jin Sakamoto¹ (1.Osaka Pref. Univ.)

9:30 AM - 11:30 AM

[12a-PB1-9] Measurement of Tetramethylsilane Plasma Properties for Si-containing DLC Coating -Gas-Flow Rate Dependence of Fundamental Plasma Properties-

〇Yuuya Ohno¹, Masayuki Nagai¹, Shun Suzuki¹, Akinori Oda¹, Takayuki Ohta², Hiroyuki Kousaka³ (1.Chiba Tech, 2.Meijo Univ., 3.Gifu Univ.)

Session information

[12a-PB1-1~9] 8.1 Plasma production and diagnostics

[12a-PB1-1] Ion Bombardment to Insulated Surface by Applying DC Pulse Voltage to a Microwave Antenna

[12a-PB1-2] Improvement of controlling iron vapor flux by induction heating for producing iron endohedral fullerene

[12a-PB1-3] Preliminary experiments for optimization of multipole magnetic field and position of extraction electrode on ECRIS

[12a-PB1-4] Fluid analysis of an atmospheric-pressure μplasma ejected from a narrow nozzle

[12a-PB1-5] Delayed discharge and optical emission characteristics in high power pulsed magnetron sputtering with Ar flow control

[12a-PB1-6] Micro- and macro-pulse designs in high power pulsed magnetron sputtering and the optical emission spectroscopy for generated plasma

[12a-PB1-7] Measurements of Emission Propagation Phenomena in a Low-Temperature Atmospheric-Pressure Plasma Jet

[12a-PB1-8] Measurement of Reactive Oxygen Radicals with Polyvinyl Alcohol - Potassium Iodine

[12a-PB1-9] Measurement of Tetramethylsilane Plasma Properties for Si-containing DLC Coating -Gas-Flow Rate Dependence of Fundamental Plasma Properties-

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