The 66th JSAP Spring Meeting, 2019

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Poster presentation

13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices

[10a-PB2-1~18] 13.2 Exploratory Materials, Physical Properties, Devices

Sun. Mar 10, 2019 9:30 AM - 11:30 AM PB2 (PB)

9:30 AM - 11:30 AM

[10a-PB2-11] Optimization of donor activation conditions in Sb-doped β-FeSi2 epitaxial films (II)

〇(M2)Hajime Eguchi1, Mitsuki Abe1, Ryota Kinoshita1, Tomoki Murakami1, Yoshikazu Terai1 (1.Kyushu Inst. of Tech.)

Keywords:beta-FeSi2, semiconductor, Sb dope