[10p-M114-1~12] Progress of characterization and monitoring techniques that reveal fundamental of light process

[10p-M114-6] Time-resolved imaging of photoresist stripping dynamics induced by laser irradiation II

〇(B)Naoki Nishioka^1,3, Yuji Umeda¹, Yusuke Funamoto¹, Daichi Shima¹, Tomosumi Kamimura¹, Hideo Horibe², Masashi Yoshimura³, Ryosuke Nakamura³ (1.Osaka Inst Tech Univ., 2.Osaka City Univ., 3.Osaka Univ.)

Keywords:optics, laser damage