Symposium (Oral)
[10p-M114-1~12] Progress of characterization and monitoring techniques that reveal fundamental of light process
Sun. Mar 10, 2019 1:30 PM - 6:15 PM M114 (H114)
Daisuke Nakamura(Kyushu Univ.)
△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above
1:30 PM - 2:00 PM
〇Kentaro Taki1 (1.Kanazawa Univ.)
2:00 PM - 2:30 PM
〇Shuntaro Tani1, Yohei Kobayashi1 (1.ISSP, Univ. Tokyo)
2:30 PM - 3:00 PM
〇Yuji Sato1, Masahiro Tsukamoto2, Takahisa Shobu1, Toshiharu Muramatsu1 (1.JAEA, 2.JWRI, Osaka Univ.)
3:15 PM - 3:45 PM
〇Yoshio Hayasaki1 (1.Utsunomiya Univ.)
3:45 PM - 4:15 PM
〇Rie Yamagishi1 (1.Fukuoka Tech.)
4:15 PM - 4:30 PM
[10p-M114-6] Time-resolved imaging of photoresist stripping dynamics induced by laser irradiation II
〇(B)Naoki Nishioka1,3, Yuji Umeda1, Yusuke Funamoto1, Daichi Shima1, Tomosumi Kamimura1, Hideo Horibe2, Masashi Yoshimura3, Ryosuke Nakamura3 (1.Osaka Inst Tech Univ., 2.Osaka City Univ., 3.Osaka Univ.)
4:30 PM - 4:45 PM
〇Satoshi Hasegawa1, Masatoshi Fujimoto2, Yoshio Hayasaki1 (1.Utsunomiya Univ., 2.Hamamatsu Photonics)
5:00 PM - 5:15 PM
〇Yusuke Ito1, Reina Yoshizaki1, Naoyuki Miyamoto1, Akihiro Shibata2, Ikuo Nagasawa2, Keisuke Nagato1, Naohiko Sugita1 (1.Univ. Tokyo, 2.AGC Inc.)
5:15 PM - 5:30 PM
〇(M1)Tsubasa Endo1, Shuntaro Tani1, Yohei Kobayashi1 (1.ISSP, Univ. Tokyo)
5:30 PM - 5:45 PM
〇(M1)Kohei Shimahara1, Shuntaro Tani1, Yohei Kobayashi1 (1.ISSP, Univ. Tokyo)
5:45 PM - 6:00 PM
〇Yuta Tanaka1, Shinji Tsuneyuki1,2 (1.Dept. of Phys., The Univ. of Tokyo, 2.ISSP, The Univ. of Tokyo)
6:00 PM - 6:15 PM
〇(M1)Hiroki Oshima1, Yuichiro Wakiyama1, Miki Kawamoto1, Mitsuhiro Higashihata1, Hiroshi Ikenoue1, Daisuke Nakamura1 (1.Kyushu Univ.)