[10p-PB5-1~55] 17 Nanocarbon Technology (Poster)

[10p-PB5-54] Transfer printing of Al₂O₃ gate dielectric to fabricate top-gate MoS₂ FET

〇Takamasa Kawanago¹, Tomoaki Oba¹, Shunri Oda¹ (1.Tokyo Tech. QNERC)

Keywords:Transfer printing, high-k, MoS2