1:30 PM - 1:45 PM
[10p-W934-1] Evaluation of ultra low density metal contamination by Pulse Photoconductivity Method
Keywords:semiconductor
The pulsed photoconduction method is a method of measuring the conductivity of an insulator using the internal photoelectric effect and the dielectric polarization of an insulator.The pulsed photoconduction method can evaluate metal contamination of very low density which can not be detected by conventional measuring methods.In addition, since non-destructive and non-contact inspection is possible, the stress to be applied to the measurement object is very small and in-line measurement can be performed.