[10p-W934-1~12] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[10p-W934-2] Development of noncontact multi-measurement using Pulse Photoconductive Method

〇Shotaro Kuzukawa¹, Hiroki Matsuyama¹, Narumi Abe¹, Yuki Kumagae¹, Yuichiro Shimazu¹, Kotaro Nagatomo², Shunsuke Nakamura², Yusuke Nakayama², Kazuhiro Kobayashi¹, Hiroshi Kubota¹, Takeshi Hashishin¹, Masao Yoshioka² (1.GSST Kumamoto Univ., 2.Faculty of Technology Kumamoto Univ.)

Keywords:evaluation, insulator, conduction

Thinning of the gate insulator film has resulted in physical and technical problems such as an increase in leakage current. The miniaturization is still a continuation expectation in the future, evaluation technology including reliability is important. We have proposed Pulse Photoconductive Method (PPCM) as an evaluation method of insulator film. PPCM measures the dielectric polarization characteristics of the insulating film and calculates the electric conductivity. In this presentation, we propose a noncontact multi-measurement applying Pulse Photoconductive Method.