[11a-W351-1~11] 6.1 Ferroelectric thin films

[11a-W351-5] Doping effect on lead-free (K, Na)NbO₃ thin films

〇Geng Tan¹, Takuya Fujita¹, Shintaro Nishioka¹, Isaku Kanno¹ (1.Kobe Univ.)

Keywords:lead-free piezoelectric thin films

Recently, lead-free (K, Na)NbO₃ thin films have attracted much attention as candidates to replace PZT thin films. Doping is one of the effective way to improve the electrical and piezoelectric properties. However, there have been few reports of systematic investigations. In this study, we prepared doped KNN thin films by radio frequency magnetron sputtering method using multi targets; KNN targets and dopant targets. We investigated the doping effect on the electrical and piezoelectric properties of KNN thin films.