A Study on Parallel-Plate Electrodes for 3-Axis Au Proof-Mass MEMS Accelerometer

Takashi Ichikawa; Hirofumi Niijima; Tatsuya Koga; Daisuke Yamane; Shin-ichi Iida; Hiroyuki Ito; Noboru Ishihara; Masato Sone; Katsuyuki Machida; Kazuya Masu

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[11a-W934-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Mon. Mar 11, 2019 9:00 AM - 11:45 AM W934 (W934)

Hiromu Ishii(Toyohashi Univ. of Tech.), Minoru Sasaki(Toyota Tech. Inst.)

9:15 AM - 9:30 AM

△ [11a-W934-2] A Study on Parallel-Plate Electrodes for 3-Axis Au Proof-Mass MEMS Accelerometer

〇Takashi Ichikawa¹, Hirofumi Niijima¹, Tatsuya Koga¹, Daisuke Yamane¹, Shin-ichi Iida², Hiroyuki Ito¹, Noboru Ishihara¹, Masato Sone¹, Katsuyuki Machida¹, Kazuya Masu¹ (1.Tokyo Tech, 2.NTT-AT)

Keywords:MEMS Accelerometer

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